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In: Microsystem Technologies, Jg. 28 (2018-09-22), S. 653-658Online unknownZugriff:
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In: Journal of Electronic Materials ; volume 52, issue 9, page 6293-6307 ; ISSN 0361-5235 1543-186X, 2023Online academicJournalZugriff:
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In: Journal of Computational Electronics, Jg. 7 (2008-03-08), S. 168-171Online unknownZugriff:
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In: Microsystem Technologies ; volume 28, issue 3, page 653-658 ; ISSN 0946-7076 1432-1858, 2018Online academicJournalZugriff:
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In: Journal of Computational Electronics ; volume 7, issue 3, page 168-171 ; ISSN 1569-8025 1572-8137, 2008Online academicJournalZugriff: