Structure and phase composition of sputter deposits from a C60 target bombarded by argon and xenon ions

DUDKIN, V. A ; PUKHA, V. E ; et al.

In: Proceedings of the International Conference on Modification of Properties of Surface Layers of Non-Semiconducting Materials using Particle Beams 2001 (MPSL 2001), 27-30 August 2001, Feodosiya, UkraineVacuum 68(3):251-256; Jg. 68 (2002) 3, S. 251-256

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The structural and morphological features of films deposited by sputtering C60 target with argon or xenon ions at 30° to a surface have been studied by the TEM. The energy of ions was varied from several hundreds of eV up to several keV. Films deposited with high-energy sputtering ions (several keV) have amorphous single-phase structure while at ion energies up to 1 keV particles of a second phase appear. This second phase is also amorphous but its properties differ from the original amorphous phase, which serves as a matrix. In situ heating a film in an electron microscope has resulted in evaporation of these particles and appearance in their place of deep crater-shaped structures. The contrast of the matrix does not vary afterward. The quantity and the size of particles of the volatile phase increases when the energy of ions decreases. Both the relationship between processes taking place on the target during sputtering and structural features of the film are shown.

Titel:	Structure and phase composition of sputter deposits from a C60 target bombarded by argon and xenon ions
Autor/in / Beteiligte Person:	DUDKIN, V. A ; PUKHA, V. E ; VUS, A. S ; STETSENKO, A. N ; SAVITSKY, B. A ; VOVK, O. M
Link:	View record from ScienceDirect (Volltext) View record from PASCAL Archive
Quelle:	Proceedings of the International Conference on Modification of Properties of Surface Layers of Non-Semiconducting Materials using Particle Beams 2001 (MPSL 2001), 27-30 August 2001, Feodosiya, UkraineVacuum 68(3):251-256; Jg. 68 (2002) 3, S. 251-256
Veröffentlichung:	Oxford: Elsevier, 2002
Medientyp:	Konferenz
Umfang:	print, 4 ref
ISSN:	0042-207X (print)
Schlagwort:	Metallurgy, welding Métallurgie, soudage Physics Physique Sciences exactes et technologie Exact sciences and technology Etat condense: structure, proprietes mecaniques et thermiques Condensed matter: structure, mechanical and thermal properties Structure des liquides et des solides; cristallographie Structure of solids and liquids; crystallography Fullerènes et matériaux apparentés Fullerenes and fullerene-related materials Domaines interdisciplinaires: science des materiaux; rheologie Cross-disciplinary physics: materials science; rheology Science des matériaux Materials science Méthodes de dépôt de films et de revêtements; croissance de films et épitaxie Methods of deposition of films and coatings; film growth and epitaxy Epitaxie en phase vapeur; croissance en phase vapeur Vapor phase epitaxy; growth from vapor phase Non métal Nonmetals Agrégat atomique Atomic clusters Argon ion Argon ions Carbone Molécule Carbon Molecules Couche mince Thin films Cristallinité Crystallinity Cristalinidad Etat amorphe Amorphous state Etude expérimentale Experimental study Fullerènes Fullerenes Morphologie Morphology Méthode phase vapeur Growth from vapor Método fase vapor Nanocristal Nanocrystal Préparation chimique Chemical preparation Pulvérisation faisceau ionique Ion beam sputtering Pulverización haz iónico Rugosité Roughness Surface Surfaces Traitement thermique Heat treatments Xénon ion Xenon ions C60 Carbon Fullerene Ion beam Sputtering
Sonstiges:	Nachgewiesen in: PASCAL Archive Sprachen: English Original Material: INIST-CNRS Document Type: Conference Paper File Description: text Language: English Author Affiliations: National Technical Institute (Kharkiv Polytechnical Institute), 21, Frunze Street, Kharkiv 61002, Ukraine ; Institute for Low Temperature Physics and Engineering, National Academy of Sciences of Ukraine, 47, Lenin Avenue, Kharkiv 61103, Ukraine Rights: Copyright 2003 INIST-CNRS ; CC BY 4.0 ; Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS Notes: Physics and materials science ; Physics of condensed state: structure, mechanical and thermal properties

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