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A two-step method is offered for the synthesis of vanadium oxide films to purposely change their functional properties. Vanadium oxide films were deposited on glass and silicon substrates by using magnetron sputtering of the vanadium target at various substrate temperatures (180-500 °C). During deposition, the substrate temperature predetermines structural and functional properties of the films after their following low-temperature (250-350 °C) annealing. In the films deposited at low substrate temperatures (200-220 °C), after low-temperature annealing there formed are flat crystallites of vanadium dioxide with lateral sizes 1 to 2 μm. which provides a high thermochromic effect. In the films deposited at temperatures of 250-300 °C, during the following low-temperature annealing the microcrystalline mixture of different vanadium oxides (50-150 nm) is formed, which provides a high value of the thermal coefficient of resistance for these films (7%/K). The low temperature annealing practically does not change the properties of films deposited at temperatures of 450-500 °C.

Titel:	Structural transformation and functional properties of vanadium oxide films after low-temperature annealing
Autor/in / Beteiligte Person:	GOLTVYANSKYI, Yu ; KHATSEVYCH, I ; KUCHUK, A ; KLADKO, V ; MELNIK, V ; LYTVYN, P ; NIKIRIN, V ; ROMANYUK, B
Link:	View record from ScienceDirect (Volltext) View record from PASCAL Archive
Zeitschrift:	Thin solid films, Jg. 564 (2014), S. 179-185
Veröffentlichung:	Amsterdam: Elsevier, 2014
Medientyp:	academicJournal
Umfang:	print, 37 ref
ISSN:	0040-6090 (print)
Schlagwort:	Crystallography Cristallographie cristallogenèse Metallurgy, welding Métallurgie, soudage Condensed state physics Physique de l'état condensé Sciences exactes et technologie Exact sciences and technology Physique Physics Etat condense: structure, proprietes mecaniques et thermiques Condensed matter: structure, mechanical and thermal properties Surfaces et interfaces; couches minces et trichites (structure et propriétés non électroniques) Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Structure et morphologie de couches minces Thin film structure and morphology Structure et morphologie; épaisseur Structure and morphology; thickness Composition et identification des phases Composition and phase identification Domaines interdisciplinaires: science des materiaux; rheologie Cross-disciplinary physics: materials science; rheology Science des matériaux Materials science Méthodes de dépôt de films et de revêtements; croissance de films et épitaxie Methods of deposition of films and coatings; film growth and epitaxy Depôt par pulvérisation cathodique Deposition by sputtering Couche mince Thin films Cristallite Crystallites Dépendance température Temperature dependence Dépôt physique phase vapeur Physical vapor deposition Dépôt pulvérisation Sputter deposition Microstructure Oxyde de vanadium Vanadium oxide Vanadio óxido Plan expérience Experimental design Pulvérisation cathodique Cathode sputtering Pulvérisation irradiation Sputtering Recuit thermique Thermal annealing Recocido térmico Résistance thermique Thermal resistance Température recuit Annealing temperature Temperatura recocido Thermochromisme Thermochromism Termocromismo Transformation phase Phase transformations 6855J 6855N 8115C Substrat silicium Substrat verre Annealing Functional properties
Sonstiges:	Nachgewiesen in: PASCAL Archive Sprachen: English Original Material: INIST-CNRS Document Type: Article File Description: text Language: English Author Affiliations: V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, 41 Prospect Nauki, Kyiv 03028, Ukraine Rights: Copyright 2015 INIST-CNRS ; CC BY 4.0 ; Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS Notes: Physics and materials science ; Physics of condensed state: structure, mechanical and thermal properties

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Structural transformation and functional properties of vanadium oxide films after low-temperature annealing