Monte Carlo modeling of stiffness of MEMS membrane
In: MIXDES - 21st International Conference "Mixed Design of Integrated Circuits & Systems"; (2014-06-01) S. 97-100
Konferenz
Zugriff:
Titel: |
Monte Carlo modeling of stiffness of MEMS membrane
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Autor/in / Beteiligte Person: | Kosobutskyy, Petro ; Komarnutskyy, Mykhaylo ; Maj, Cezary ; Zajac, Piotr ; Szermer, Michal ; Zabierowski, Wojciech |
Quelle: | MIXDES - 21st International Conference "Mixed Design of Integrated Circuits & Systems"; (2014-06-01) S. 97-100 |
Veröffentlichung: | 2014 |
Medientyp: | Konferenz |
ISBN: | 978-83-63578-03-9 (print) ; 978-83-63578-05-3 (print) |
DOI: | 10.1109/MIXDES.2014.6872163 |
Sonstiges: |
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