The effects of surface passivation on the electrostatics of the UTB SOI devices
In: Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS); (2021-09-01) S. 1-4
Konferenz
Zugriff:
Titel: |
The effects of surface passivation on the electrostatics of the UTB SOI devices
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Autor/in / Beteiligte Person: | Solanki, Ravi ; Medury, Aditya Sankar |
Quelle: | Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS); (2021-09-01) S. 1-4 |
Veröffentlichung: | 2021 |
Medientyp: | Konferenz |
ISBN: | 978-1-6654-3745-5 (print) |
ISSN: | 2472-9132 (print) |
DOI: | 10.1109/EuroSOI-ULIS53016.2021.9560686 |
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