Effects of thinning condensation UTB GOI films by additional thermal oxidation on GOI Characteristics / 酸化濃縮後の追加酸化による薄膜化がGOI薄膜の特性に与える影響
2014
Online
academicJournal
Zugriff:
Titel: |
Effects of thinning condensation UTB GOI films by additional thermal oxidation on GOI Characteristics / 酸化濃縮後の追加酸化による薄膜化がGOI薄膜の特性に与える影響
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Autor/in / Beteiligte Person: | Takenaka, Mitsuru ; Takagi, Shinichi ; Kim, WuKang ; 充, 竹中 ; 佑彊, 金 ; 信一, 高木 |
Link: | |
Veröffentlichung: | 2014 |
Medientyp: | academicJournal |
ISSN: | 2436-7613 (print) |
DOI: | 10.11470/jsapmeeting.2014.2.0_2806 |
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