Realization of UTB-SGOI with tensile strain through hetero-layer transfer technique / ヘテロ転写技術を用いた引張り歪みUTB-SGOIの実現
2016
Online
academicJournal
Zugriff:
Titel: |
Realization of UTB-SGOI with tensile strain through hetero-layer transfer technique / ヘテロ転写技術を用いた引張り歪みUTB-SGOIの実現
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Autor/in / Beteiligte Person: | Hattori, Hiroyuki ; Ishii, Hiroyuki ; Uchida, Noriyuki ; Maeda, Tatsuro ; Irisawa, Toshifumi ; WENHSIN, CHANG ; 寿史, 入沢 ; 紀行, 内田 ; 辰郎, 前田 ; 文馨, 張 ; 浩之, 服部 ; 裕之, 石井 |
Link: | |
Veröffentlichung: | 2016 |
Medientyp: | academicJournal |
ISSN: | 2436-7613 (print) |
DOI: | 10.11470/jsapmeeting.2016.2.0_3214 |
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